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C02700 - SEMI C27 - Specification and Guide for Hydrochloric Acid Revision:SEMI C27-0708 - Superseded This Document covers requirements for

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Description

This Document covers requirements for octafluorocyclobutane (C4F8) used in the semiconductor industry

この水分の発生は,多くの過ちに陥りがちであるので,スタンダードによって供給された予測水分濃度と分析によって測定されたレベルが,一致することを要求する。同意されたレベルは,標準水分に対して要求される正確さの度合いに依存して変わる。しかしどんな場合でも,測定し予測した結果は,水分基準の全レンジにわたって10%以内にあるべきである。もしそうでなければ,予測に基づき,どんな他のパラメータでも疑わしいと思われたものは,物理的測定で確証した後に,妥当性検査を繰り返すべきである。

This Document applies only to nitrogen gas and argon gas delivered through pipelines

Alternative methods may be used as long as they have been validated in accordance with the requirements of SEMI C1

org in May 2018

C02700 - SEMI C27 - Specification and Guide for Hydrochloric Acid Revision:SEMI C27-0708 - Superseded This Document covers requirements forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications. Alternative methods may

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